INSTRO英斯特朗5966試驗機環境 HP12 3SY 3119-606維修
應用對象包括：刻蝕、RIE、PECVD、ICP、射頻濺射、CVD和PVD等系統，也可作為工廠業系統中感應加熱和電介質加熱設備的電源
CLX系列低頻電源、CLF系列低頻電源、CX系列高頻電源、CX5K和CX10K高頻射頻功率源、CXH系列高功率/高頻電源、CPS系列高頻電源、CB系列高頻射頻電源、CV系列甚頻（VHF）電源、CDX系列雙頻電源、XDC1000直流電源、MATCH自動調諧網絡、ESC系列靜電夾盤電源CDX 1000 - P/N FP5201R1/CDX 2000 - P/N FP5315RF/CDX 2000 - P/N FP5318R2/CDX 2000 - P/N FP5319R2/CDX 2000 - P/N FP5320R3/CLF 500 - P/N FP1254R2/CLF 1000 - P/N FP1252R2/CLF 5000 - P/N FP1541RC/CLX 600 - P/N FP1245R1/CLX 2500 - P/N FP1333R2/CLX 2500 - P/N FP1335R2/CLX 2500 - P/N FP1335R4/CLX 2500 - P/N FP1336R3/CPS 500 - P/N FP0112RF/CPS 500AS - P/N FP0113RK/CPS 1000 - P/N FP0213RK/CPS 1001 - P/N FP0213RJ/CX 650 - P/N FP3116R3/CX1250S - P/N FP3212RB/CX 1250S - P/N FP3212RC/AGA-27 60Mhz 2,7kW - P/N/AGA-27A3/ENI / MKS/DPGS-10 - DC / RF Generator - P/N DPGS-10-04/DPGS-10 - DC / RF Generator - P/N DPGS-10-05/DPGD-10 - DC /RF Generator - P/N DPGD-10-04/DPGD-10 - DC /RF Generator - P/N DPGD-10-05